yarn graphql-codegen error " require() of ES Module Y from Y not supported"

I get error:

 require() of ES Module D:\PROJEKTI\cvmds-client\node_modules\upper-case\dist\index.js from D:\PROJEKTI\cvmds-cl…
error Command failed with exit code 1.

This is package.json:

{
  "devDependencies": {
    "@graphql-codegen/c-sharp": "5.0.0",
    "@graphql-codegen/cli": "5.0.2",
    "change-case": "4.1.2",
    "upper-case": "3.0.0"
  },
  "dependencies": {
    "graphql": "16.9.0"
  },
  "type": "module"
}

and this is codegen:

overwrite: true

schema: schema.graphql
generates:
  RimacCmvdsClient/Models.generated.cs:
    plugins:
      - c-sharp
    config:
        strict: true,
       
        namespaceName: RimacCmvdsClient.Models
        namingConvention: upper-case#upperCase
        scalars:
            DateTime: DateTime
            JSON: object
            union: enum

.It used to work on previous machine.